Inflatable Door Seal for Semiconductor Processing


Clean, low-force pneumatic sealing for process chamber doors, load locks and access hatches, where contamination and downtime directly affect output. Manufactured by Bombay Rubber & Carbon Works.

Semiconductor and electronics manufacturing depends on tightly controlled process environments. A door seal that leaks, sheds particles or wears out early can mean lost yield and unplanned stoppages. An inflatable door seal tackles this differently from a conventional compression gasket: it sits in a groove with the door open and does not rub against the door as it moves. When the door is closed, a small amount of compressed air inflates the seal and presses it evenly against the mating surface.

Bombay Rubber & Carbon Works makes inflatable door seals in silicone, EPDM and other rubber grades, built to the groove, door shape and operating conditions of your equipment.

Parameter Specification
Product Inflatable door seal for semiconductor processing equipment
Materials Silicone, EPDM; neoprene and NBR on request
Hardness Soft to medium grades; typical 60 Shore A for silicone (other grades on request)
Operating medium Compressed air through a moulded or fitted inlet
Duty Vacuum or positive pressure, depending on profile and material
Construction Moulded or extruded and vulcanised; fabric-reinforced option for higher-pressure duty
Customisation Profile, length, shape, hardness, colour and inlet type as per drawing or sample

Please confirm working pressure, vacuum level, temperature range and any cleanliness or compliance requirements with our team before ordering.

  • Low-friction operation: the seal retracts when deflated, so there is little rubbing and less wear and particle generation.
  • Even, controllable sealing force: inflation pressure can be set to suit the vacuum or positive-pressure duty.
  • Clean material options: smooth-finish silicone and EPDM grades suited to controlled environments.
  • Makes up for gaps: inflation helps seal across small variations in clearance or door alignment.
  • Simpler hardware: can replace heavy clamping mechanisms on doors and hatches.
  • Made to order: profile, length, corners and air inlet built to your drawing or sample.

    Applications

    • Load locks and transfer chambers.
    • Process chamber and access doors.
    • Thermal processing equipment and furnaces (with a suitable high-temperature compound).
    • Vacuum and positive-pressure enclosures.
    • Printed circuit board imaging and exposure units, where a seal must be made across a large surface.
    • Cleanroom doors, hatches and other controlled-environment equipment.

    Benefits to Your Operation

    • Helps maintain the process environment and reduce contamination risk.
    • Faster door cycles, so less time lost between runs.
    • Longer seal life through reduced rubbing and wear.
    • Fewer parts to maintain compared with mechanical clamping.

    How to Order: Our Simple 4-Step Process

    1. Share your requirement
    Send a sketch, drawing or sample of your door and groove.
    2. Select material
    Choose silicone, EPDM or another grade suited to your process.
    3. Add special features
    Inlet position, hardness, colour or other custom needs.
    4. Delivery
    Your seal is made, checked and dispatched promptly.

    About Bombay Rubber & Carbon Works

    Bombay Rubber & Carbon Works is a Mumbai-based manufacturer of rubber and engineered rubber products, supplying inflatable seals, gaskets and custom moulded components to industrial, pharma, electronics and process customers.